The MX (Metrology and Machine Control)  cluster provides the supervisory control, modelling and optimisation algorithms to the Twinscan range of platforms. Withing this cluster, the levelling department is responsible for vertical measurement of the wafer surface relative to fiducials in the system.
 

As part of the operation of the Twinscan, there are fiducial plates that are measured every time a new wafer is loaded, to ensure the position of the sensors relative to the wafer chuck. However, at the nanometer scale, these plates can become contaminated, and also microscopic water droplets can be left on them by the immersion system.

In order to get the best positional measurement, these undesired effects must be identified and removed. While we have an algorithm that performs this, we are always looking for improvements. In this internship, you will work with domain experts to investigate the use of a Deep Learning Surrogate (DLS) in place of the current algorithm.

Key deliverables include:

The design, and training of the DLS model, using real or synthesised data as appropriate.

Benchmarking against the current non-ML algorithms.

Investigation of the integration into the current (C++) Twinscan environment, with topics such as diagnostics capabilities, data mapping, control logic, process deployment, updates of weights in an industrial environment, compute resource requirements, and more
 

This is a (preferably) master or university bachelor internship (also suited for a thesis internship) for minimum 5 months, minimum 4 days per week (2-3 days on-site). The start date of this internship is February 2026 (or sooner).
 

To be a match for this internship, you:

Have a background in Computer science, machine learning, AI or related.

Have experience with Python, PyTorch / Tensorflow, C+++

Have familiarity with MATLAB, this would be a bonus

Have a professional communication and documentation: can explain and present technical matters within the team;

Are pragmatic, pro-active, ‘self-propelling’ way of working and able to operate in a dynamic environment.
 

Other requirements you need to meet

You are enrolled at an educational institute for the entire duration of the internship;

You need to be located in the Netherlands to be perform your internship. In case you ‘re currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate.

If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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